3-D surface inspection using interferometric grating and 2-D FFT based technique

Y. Y. Hung, S. H. Tang, Q. Zhu

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

A new method, based on the combination of interferometric grating projection technique and two-dimensional digital FFT (Fast Fourier Transformation) based phase-measurement technique, for three-dimensional shape measurement and surface inspection is presented in this paper. The projection technique generates an interferometric grating focusing everywhere in its illuminating space so that there is no focusing problem in this new technique. The phase measurement technique provides better separation of the desired depth information from noises and is capable of extracting accurate phase value at every pixel point. Consequently, the new method can obtain depth information corresponding to each pixel point in a high precision.

Original languageEnglish (US)
Pages (from-to)696-703
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1332
Issue numberpt 2
StatePublished - Dec 1 1990
EventOptical Testing and Metrology III: Recent Advances in Industrial Optical Inspection - San Diego, CA, USA
Duration: Jul 8 1990Jul 13 1990

Fingerprint

Phase measurement
Fourier Transformation
fast Fourier transformations
Gratings
3D
Phase Measurement
Inspection
inspection
Pixels
Measurement Techniques
gratings
Pixel
projection
pixels
Projection
Shape Measurement
illuminating
Three-dimensional

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

3-D surface inspection using interferometric grating and 2-D FFT based technique. / Hung, Y. Y.; Tang, S. H.; Zhu, Q.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1332, No. pt 2, 01.12.1990, p. 696-703.

Research output: Contribution to journalConference article

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